Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10519546 | Apparatus and method for providing a uniform flow of gas | Ravi Jallepally, Ilker Durukan | 2019-12-31 |
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Wei V. Tang +6 more | 2019-09-10 |
| 10214815 | Surface treated aluminum nitride baffle | Dmitry Lubomirsky | 2019-02-26 |
| 10199204 | Target retaining apparatus | Srinivasa Rao YEDLA, Sundarapandian Ramalinga Vijayalakshmi REDDY, Uday Pai, Kirankumar Neelasandra SAVANDAIAH, Thanh X. Nguyen +1 more | 2019-02-05 |
| 10167553 | Apparatus and method for providing a uniform flow of gas | Ravi Jallepally, Ilker Durukan | 2019-01-01 |