Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D851613 | Target profile for a physical vapor deposition chamber target | William Johanson, Anthony Chih-Tung Chan, Siew Kit Hoi, Prashant Prabhakar Prabhu | 2019-06-18 |
| 10312116 | Methods and apparatus for rapidly cooling a substrate | Jallepally Ravi, Steven V. Sansoni | 2019-06-04 |
| 10262877 | Apparatus and method for reducing substrate sliding in process chambers | Sriskantharajah Thirunavukarasu, Cheng-Hsiung Tsai, Kai Liang Liew | 2019-04-16 |
| 10199204 | Target retaining apparatus | Srinivasa Rao YEDLA, Sundarapandian Ramalinga Vijayalakshmi REDDY, Uday Pai, Thanh X. Nguyen, Muhammad M. Rasheed +1 more | 2019-02-05 |