Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431489 | Substrate support apparatus having reduced substrate particle generation | Pulkit Agarwal, Song-Moon Suh, Glen T. Mori | 2019-10-01 |
| 10312116 | Methods and apparatus for rapidly cooling a substrate | Jallepally Ravi, Kirankumar Neelasandra SAVANDAIAH | 2019-06-04 |
| 10312127 | Compliant robot blade for defect reduction | Jeffrey A. Brodine, Glen T. Mori | 2019-06-04 |