Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431489 | Substrate support apparatus having reduced substrate particle generation | Pulkit Agarwal, Song-Moon Suh, Steven V. Sansoni | 2019-10-01 |
| 10312127 | Compliant robot blade for defect reduction | Steven V. Sansoni, Jeffrey A. Brodine | 2019-06-04 |