Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431489 | Substrate support apparatus having reduced substrate particle generation | Pulkit Agarwal, Glen T. Mori, Steven V. Sansoni | 2019-10-01 |
| 10217650 | Methods and apparatus for substrate edge cleaning | James M. Holden, Todd Egan, Kalyanjit Ghosh, Leon Volfovski, Michael R. Rice +1 more | 2019-02-26 |