Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10242890 | Substrate support with heater | Mayur Govind Kulkarni | 2019-03-26 |
| 10217650 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Michael R. Rice +1 more | 2019-02-26 |