Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494715 | Atomic layer clean for removal of photoresist patterning scum | Purushottam Kumar, Adrien LaVoie | 2019-12-03 |
| 10431451 | Methods and apparatuses for increasing reactor processing batch size | Purushottam Kumar, Richard Phillips, Adrien LaVoie | 2019-10-01 |
| 10431489 | Substrate support apparatus having reduced substrate particle generation | Song-Moon Suh, Glen T. Mori, Steven V. Sansoni | 2019-10-01 |
| 10269559 | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer | Joseph R. Abel, Richard Phillips, Purushottam Kumar, Adrien LaVoie | 2019-04-23 |