Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431451 | Methods and apparatuses for increasing reactor processing batch size | Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie | 2019-10-01 |
| 10403474 | Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system | Ryan Blaquiere, Shankar Swaminathan | 2019-09-03 |
| 10269559 | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer | Joseph R. Abel, Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie | 2019-04-23 |