Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418236 | Composite dielectric interface layers for interconnect structures | Kapu Sirish Reddy, Nagraj Shankar, Meliha Gozde Rainville, Frank L. Pasquale | 2019-09-17 |
| 10407773 | Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system | Adrien LaVoie, Hu Kang, Purushottam Kumar, Jun Qian, Frank L. Pasquale +1 more | 2019-09-10 |
| 10403474 | Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system | Richard Phillips, Ryan Blaquiere | 2019-09-03 |
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Ramesh Chandrasekharan, Saangrut Sangplung, Frank L. Pasquale, Hu Kang, Adrien LaVoie +6 more | 2019-08-13 |
| 10361076 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Jun Qian, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2019-07-23 |
| 10323323 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Ramesh Chandrasekharan, Jennifer O'Loughlin, Saangrut Sangplung, Frank L. Pasquale, Chloe Baldasseroni +1 more | 2019-06-18 |
| 10301718 | Asymmetric pedestal/carrier ring arrangement for edge impedance modulation | Ryan Blaquiere, Ramesh Chandrasekharan, Yukinori Sakiyama | 2019-05-28 |
| 10192742 | Soft landing nanolaminates for advanced patterning | Frank L. Pasquale, Adrien LaVoie, Nader Shamma, Girish Dixit | 2019-01-29 |