Issued Patents 2019
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514598 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Thomas Knisley +3 more | 2019-12-24 |
| 10494715 | Atomic layer clean for removal of photoresist patterning scum | Pulkit Agarwal, Purushottam Kumar | 2019-12-03 |
| 10431451 | Methods and apparatuses for increasing reactor processing batch size | Pulkit Agarwal, Purushottam Kumar, Richard Phillips | 2019-10-01 |
| 10407773 | Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system | Hu Kang, Purushottam Kumar, Shankar Swaminathan, Jun Qian, Frank L. Pasquale +1 more | 2019-09-10 |
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Hu Kang +6 more | 2019-08-13 |
| 10361076 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Jun Qian, Wanki Kim, Dennis M. Hausmann +1 more | 2019-07-23 |
| 10351953 | Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system | Jun Qian, Purushottam Kumar, You Zhai, Jeremiah Baldwin, Sung Je Kim | 2019-07-16 |
| 10323323 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Ramesh Chandrasekharan, Jennifer O'Loughlin, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale +1 more | 2019-06-18 |
| 10269559 | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer | Joseph R. Abel, Pulkit Agarwal, Richard Phillips, Purushottam Kumar | 2019-04-23 |
| 10202691 | Showerhead curtain gas method and system for film profile modulation | Ishtak Karim | 2019-02-12 |
| 10192742 | Soft landing nanolaminates for advanced patterning | Frank L. Pasquale, Shankar Swaminathan, Nader Shamma, Girish Dixit | 2019-01-29 |