Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10351953 | Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system | Jun Qian, Purushottam Kumar, Adrien LaVoie, You Zhai, Jeremiah Baldwin | 2019-07-16 |