Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494715 | Atomic layer clean for removal of photoresist patterning scum | Pulkit Agarwal, Adrien LaVoie | 2019-12-03 |
| 10431451 | Methods and apparatuses for increasing reactor processing batch size | Pulkit Agarwal, Richard Phillips, Adrien LaVoie | 2019-10-01 |
| 10407773 | Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system | Adrien LaVoie, Hu Kang, Shankar Swaminathan, Jun Qian, Frank L. Pasquale +1 more | 2019-09-10 |
| 10351953 | Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system | Jun Qian, Adrien LaVoie, You Zhai, Jeremiah Baldwin, Sung Je Kim | 2019-07-16 |
| 10311723 | Parking management system and method | Suman A. Sehra, Sameer Sharma, Karthik Vasan, Sergio Piedrahita, Robin Mcgechie | 2019-06-04 |
| 10269559 | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer | Joseph R. Abel, Pulkit Agarwal, Richard Phillips, Adrien LaVoie | 2019-04-23 |
| 10224235 | Systems and methods for creating airgap seals using atomic layer deposition and high density plasma chemical vapor deposition | Jason D. Park, Bart J. van Schravendijk, Hsiang-Yun Lee | 2019-03-05 |