Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10224235 | Systems and methods for creating airgap seals using atomic layer deposition and high density plasma chemical vapor deposition | Jason D. Park, Bart J. van Schravendijk, Purushottam Kumar | 2019-03-05 |