Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418236 | Composite dielectric interface layers for interconnect structures | Kapu Sirish Reddy, Nagraj Shankar, Shankar Swaminathan, Meliha Gozde Rainville | 2019-09-17 |
| 10407773 | Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system | Adrien LaVoie, Hu Kang, Purushottam Kumar, Shankar Swaminathan, Jun Qian +1 more | 2019-09-10 |
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Hu Kang, Adrien LaVoie +6 more | 2019-08-13 |
| 10323323 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Ramesh Chandrasekharan, Jennifer O'Loughlin, Saangrut Sangplung, Shankar Swaminathan, Chloe Baldasseroni +1 more | 2019-06-18 |
| 10192742 | Soft landing nanolaminates for advanced patterning | Shankar Swaminathan, Adrien LaVoie, Nader Shamma, Girish Dixit | 2019-01-29 |