Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Hu Kang, Adrien LaVoie +6 more | 2019-08-13 |
| 10347547 | Suppressing interfacial reactions by varying the wafer temperature throughout deposition | Seshasayee Varadarajan, Aaron R. Fellis, Andrew John McKerrow, James S. Sims, Jon Henri | 2019-07-09 |
| 10323323 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Jennifer O'Loughlin, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Chloe Baldasseroni +1 more | 2019-06-18 |
| 10301718 | Asymmetric pedestal/carrier ring arrangement for edge impedance modulation | Ryan Blaquiere, Shankar Swaminathan, Yukinori Sakiyama | 2019-05-28 |
| 10287683 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Douglas Keil, Edward Augustyniak, Karl Leeser | 2019-05-14 |