Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472730 | Electrolyte concentration control system for high rate electroplating | Steven T. Mayer, Jonathan D. Reid | 2019-11-12 |
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Hu Kang +6 more | 2019-08-13 |
| 10347547 | Suppressing interfacial reactions by varying the wafer temperature throughout deposition | Aaron R. Fellis, Andrew John McKerrow, James S. Sims, Ramesh Chandrasekharan, Jon Henri | 2019-07-09 |