Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Ramesh Chandrasekharan, Shankar Swaminathan, Frank L. Pasquale, Hu Kang, Adrien LaVoie +6 more | 2019-08-13 |
| 10323323 | Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition | Ramesh Chandrasekharan, Jennifer O'Loughlin, Shankar Swaminathan, Frank L. Pasquale, Chloe Baldasseroni +1 more | 2019-06-18 |