Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10454029 | Method for reducing the wet etch rate of a sin film without damaging the underlying substrate | Dennis M. Hausmann | 2019-10-22 |
| 10347547 | Suppressing interfacial reactions by varying the wafer temperature throughout deposition | Seshasayee Varadarajan, Aaron R. Fellis, James S. Sims, Ramesh Chandrasekharan, Jon Henri | 2019-07-09 |
| 10319582 | Methods and apparatus for depositing silicon oxide on metal layers | Bhadri N. Varadarajan, Zhe Gui, Bo Gong | 2019-06-11 |
| 10240236 | Clean resistant windows for ultraviolet thermal processing | James Lee, George Andrew Antonelli, Kevin McLaughlin, Curtis Bailey, Alexander R. Fox +5 more | 2019-03-26 |