Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325773 | Conformal deposition of silicon carbide films | Bhadri N. Varadarajan, Zhe Gui | 2019-06-18 |
| 10319582 | Methods and apparatus for depositing silicon oxide on metal layers | Bhadri N. Varadarajan, Zhe Gui, Andrew John McKerrow | 2019-06-11 |
| 10297442 | Remote plasma based deposition of graded or multi-layered silicon carbide film | Bhadri N. Varadarajan, Guangbi Yuan, Zhe Gui, Fengyuan Lai | 2019-05-21 |