Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514598 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2019-12-24 |
| 10472714 | Method to obtain SiC class of films of desired composition and film properties | — | 2019-11-12 |
| 10325773 | Conformal deposition of silicon carbide films | Bo Gong, Zhe Gui | 2019-06-18 |
| 10319582 | Methods and apparatus for depositing silicon oxide on metal layers | Zhe Gui, Bo Gong, Andrew John McKerrow | 2019-06-11 |
| 10297442 | Remote plasma based deposition of graded or multi-layered silicon carbide film | Bo Gong, Guangbi Yuan, Zhe Gui, Fengyuan Lai | 2019-05-21 |
| 10211310 | Remote plasma based deposition of SiOC class of films | — | 2019-02-19 |