Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514598 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2019-12-24 |
| 10288408 | Scanning white-light interferometry system for characterization of patterned semiconductor features | Nigel P. Smith | 2019-05-14 |
| 10240236 | Clean resistant windows for ultraviolet thermal processing | James Lee, Kevin McLaughlin, Andrew John McKerrow, Curtis Bailey, Alexander R. Fox +5 more | 2019-03-26 |
| 10214816 | PECVD apparatus for in-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joseph L. Womack, Dong Niu, Keith Fox +5 more | 2019-02-26 |