Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514598 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2019-12-24 |
| 10199235 | Liner and barrier applications for subtractive metal integration | Hui-Jung Wu, Nagraj Shankar, Meihua Shen, John Hoang, Prithu Sharma | 2019-02-05 |