Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472716 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Jeffrey Womack, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani, Feng Bi +3 more | 2019-11-12 |
| 10418236 | Composite dielectric interface layers for interconnect structures | Kapu Sirish Reddy, Shankar Swaminathan, Meliha Gozde Rainville, Frank L. Pasquale | 2019-09-17 |
| 10199235 | Liner and barrier applications for subtractive metal integration | Hui-Jung Wu, Thomas Knisley, Meihua Shen, John Hoang, Prithu Sharma | 2019-02-05 |