Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514598 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2019-12-24 |
| 10424460 | Systems, methods and apparatus for choked flow element extraction | Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2019-09-24 |
| 10386828 | Methods and apparatuses for etch profile matching by surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Juline Shoeb, Alex Paterson | 2019-08-20 |
| 10332727 | Methods for processing substrates using small plasma chambers | Rajinder Dhindsa, Mukund Srinivasan | 2019-06-25 |
| 10303830 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson | 2019-05-28 |
| 10283325 | Distributed multi-zone plasma source systems, methods and apparatus | Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2019-05-07 |
| 10269545 | Methods for monitoring plasma processing systems for advanced process and tool control | — | 2019-04-23 |
| 10197908 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Richard Wise, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III +1 more | 2019-02-05 |