Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386828 | Methods and apparatuses for etch profile matching by surface kinetic model optimization | Saravanapriyan Sriraman, Andrew D. Bailey, III, Juline Shoeb, Alex Paterson, Richard A. Gottscho | 2019-08-20 |
| 10303830 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2019-05-28 |
| 10254641 | Layout pattern proximity correction through fast edge placement error prediction | Julien Mailfert, Saravanapriyan Sriraman | 2019-04-09 |
| 10242849 | System and method for detecting a process point in multi-mode pulse processes | Yassine Kabouzi, Jorge Luque, Andrew D. Bailey, III, Ramkumar Subramanian, Yoko Yamaguchi | 2019-03-26 |