Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446394 | Spacer profile control using atomic layer deposition in a multiple patterning process | Mirzafer Abatchev, Qian Fu, Aaron Eppler | 2019-10-15 |
| RE47650 | Method of tungsten etching | Ramkumar Subramanian, Anne Le Gouil | 2019-10-15 |
| 10242849 | System and method for detecting a process point in multi-mode pulse processes | Yassine Kabouzi, Jorge Luque, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian | 2019-03-26 |