Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504704 | Plasma etching systems and methods using empirical mode decomposition | Luc Albarede, Yassine Kabouzi, Andrew D. Bailey, III | 2019-12-10 |
| 10242849 | System and method for detecting a process point in multi-mode pulse processes | Yassine Kabouzi, Andrew D. Bailey, III, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi | 2019-03-26 |
| 10224187 | Detecting partial unclamping of a substrate from an ESC of a substrate processing system | Dmitry Opaits, Benny Wu | 2019-03-05 |