Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312121 | Systems and methods for aligning measurement device in substrate processing systems | Marcus Musselman, Andrew D. Bailey, III | 2019-06-04 |
| 10224187 | Detecting partial unclamping of a substrate from an ESC of a substrate processing system | Benny Wu, Jorge Luque | 2019-03-05 |