Issued Patents 2019
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504704 | Plasma etching systems and methods using empirical mode decomposition | Luc Albarede, Yassine Kabouzi, Jorge Luque | 2019-12-10 |
| 10386828 | Methods and apparatuses for etch profile matching by surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Juline Shoeb, Alex Paterson, Richard A. Gottscho | 2019-08-20 |
| 10386821 | Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values | Marcus Musselman | 2019-08-20 |
| 10312121 | Systems and methods for aligning measurement device in substrate processing systems | Marcus Musselman, Dmitry Opaits | 2019-06-04 |
| 10303830 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Alex Paterson, Richard A. Gottscho | 2019-05-28 |
| 10262910 | Method of feature exaction from time-series of spectra to control endpoint of process | Ye Feng, Prashanth Kumar | 2019-04-16 |
| 10242849 | System and method for detecting a process point in multi-mode pulse processes | Yassine Kabouzi, Jorge Luque, Mehmet Derya Tetiker, Ramkumar Subramanian, Yoko Yamaguchi | 2019-03-26 |
| 10217610 | Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof | Eller Y. Juco, Neungho Shin, Yunsang Kim | 2019-02-26 |
| 10197908 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Richard Wise, Harmeet Singh, Alex Paterson, Vahid Vahedi +1 more | 2019-02-05 |
| 10181412 | Negative ion control for dielectric etch | Alexei Marakhtanov, Mirzafer Abatchev, Rajinder Dhindsa, Eric A. Hudson | 2019-01-15 |