Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403475 | Tunable multi-zone gas injection system | David Cooperberg, Douglas Ratto, Harmeet Singh, Neil Benjamin | 2019-09-03 |
| 10242883 | High aspect ratio etch of oxide metal oxide metal stack | Joydeep Guha, Sirish Reddy, Kaushik Chattopadhyay, Thomas W. Mountsier, Aaron Eppler +2 more | 2019-03-26 |
| 10224221 | Internal plasma grid for semiconductor fabrication | Harmeet Singh, Thorsten Lill, Alex Paterson, Monica Titus, Gowri Kamarthy | 2019-03-05 |
| 10197908 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Richard Wise, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III +1 more | 2019-02-05 |