NB

Neil Benjamin

Lam Research: 8 patents #10 of 444Top 3%
Overall (2019): #13,268 of 560,194Top 3%
8
Patents 2019

Issued Patents 2019

Patent #TitleCo-InventorsDate
10475623 Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods Henry Povolny, Anthony J. Ricci 2019-11-12
10460914 Ferrite cage RF isolator for power circuitry Hema Swaroop Mopidevi, John Pease, Thomas W. Anderson 2019-10-29
10403475 Tunable multi-zone gas injection system David Cooperberg, Vahid Vahedi, Douglas Ratto, Harmeet Singh 2019-09-03
10395901 Plasma ignition and sustaining apparatus Andreas Fischer 2019-08-27
10276348 Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system Alexei Marakhtanov, Eric A. Hudson, Rajinder Dhindsa 2019-04-30
10236193 Substrate supports with multi-layer structure including independent operated heater zones Harmeet Singh, Keith Gaff, Keith Comendant 2019-03-19
RE47276 RF isolation for power circuitry 2019-03-05
10192767 Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control Henry Povolny, Anthony J. Ricci 2019-01-29