Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437236 | Method of determining thermal stability of a substrate support assembly | Ole Waldmann, Eric A. Pape, Carlos Leal-Verdugo | 2019-10-08 |
| 10388493 | Component of a substrate support assembly producing localized magnetic fields | Harmeet Singh, Brett C. Richardson, Sung Lee | 2019-08-20 |
| 10381248 | Auto-correction of electrostatic chuck temperature non-uniformity | Benny Wu, Eric A. Pape | 2019-08-13 |
| 10236193 | Substrate supports with multi-layer structure including independent operated heater zones | Harmeet Singh, Neil Benjamin, Keith Comendant | 2019-03-19 |