Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437236 | Method of determining thermal stability of a substrate support assembly | Eric A. Pape, Carlos Leal-Verdugo, Keith Gaff | 2019-10-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437236 | Method of determining thermal stability of a substrate support assembly | Eric A. Pape, Carlos Leal-Verdugo, Keith Gaff | 2019-10-08 |