Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522377 | System and method for substrate support feed-forward temperature control based on RF power | Tao Zhang, Siyuan Tian, Jorge Jose Zaninovich | 2019-12-31 |
| 10437236 | Method of determining thermal stability of a substrate support assembly | Ole Waldmann, Carlos Leal-Verdugo, Keith Gaff | 2019-10-08 |
| 10381248 | Auto-correction of electrostatic chuck temperature non-uniformity | Benny Wu, Keith Gaff | 2019-08-13 |
| 10340171 | Permanent secondary erosion containment for electrostatic chuck bonds | — | 2019-07-02 |
| 10306776 | Substrate processing system printed-circuit control board assembly with one or more heater layers | Changyou Jing, Fred Dennis Egley | 2019-05-28 |
| 10186437 | Substrate holder having integrated temperature measurement electrical devices | Darrell Ehrlich, Mike Jing | 2019-01-22 |