Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10509425 | Virtual metrology method for ESC temperature estimation using thermal control elements | Tao Zhang, Jorge Jose Zaninovich | 2019-12-17 |
| 10306776 | Substrate processing system printed-circuit control board assembly with one or more heater layers | Eric A. Pape, Changyou Jing | 2019-05-28 |