Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522377 | System and method for substrate support feed-forward temperature control based on RF power | Tao Zhang, Siyuan Tian, Eric A. Pape | 2019-12-31 |
| 10509425 | Virtual metrology method for ESC temperature estimation using thermal control elements | Tao Zhang, Fred Dennis Egley | 2019-12-17 |