Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522377 | System and method for substrate support feed-forward temperature control based on RF power | Tao Zhang, Eric A. Pape, Jorge Jose Zaninovich | 2019-12-31 |
| 10207469 | Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas | Vincent M. Donnelly, Demetre J. Economou | 2019-02-19 |