Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515782 | Atomic layer etching with pulsed plasmas | Vincent M. Donnelly | 2019-12-24 |
| 10207469 | Systems and methods for rapidly fabricating nanopatterns in a parallel fashion over large areas | Vincent M. Donnelly, Siyuan Tian | 2019-02-19 |