Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10332729 | Compression member for use in showerhead electrode assembly | Daniel Arthur Brown, Ian Kenworthy | 2019-06-25 |
| 10186437 | Substrate holder having integrated temperature measurement electrical devices | Eric A. Pape, Mike Jing | 2019-01-22 |