Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2019-08-27 |
| 10332729 | Compression member for use in showerhead electrode assembly | Darrell Ehrlich, Daniel Arthur Brown | 2019-06-25 |