Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2019-08-27 |
| 10283330 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Felix Kozakevich, John Holland, Zhigang Chen, Kenneth Lucchesi +1 more | 2019-05-07 |