Issued Patents 2019
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10461505 | High brightness coherent multi-junction diode lasers | Manoj Kanskar | 2019-10-29 |
| 10460978 | Boltless substrate support assembly | Fangli Hao, Yuehong Fu | 2019-10-29 |
| 10453656 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2019-10-22 |
| 10392580 | Seed oil based reactive diluent | Wumin Yu | 2019-08-27 |
| 10395902 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2019-08-27 |
| 10381201 | Control of etch rate using modeling, feedback and impedance match | Bradford J. Lyndaker, John C. Valcore, Jr., Seyed Jafar Jafarian-Tehrani, Alexei Marakhtanov | 2019-08-13 |
| 10340122 | Systems and methods for tailoring ion energy distribution function by odd harmonic mixing | Alexei Marakhtanov, John Holland | 2019-07-02 |
| 10329377 | Highly functional epoxidized resins and coatings | Dean C. Webster, Partha Pratim Sengupta, Xiao-Dong Pan, Adlina Paramarta | 2019-06-25 |
| 10304662 | Multi regime plasma wafer processing to increase directionality of ions | Alexei Marakhtanov, Lin Zhao, Felix Kozakevich, Kenneth Lucchesi, John Holland | 2019-05-28 |
| 10283330 | Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators | Alexei Marakhtanov, Felix Kozakevich, Michael C. Kellogg, John Holland, Kenneth Lucchesi +1 more | 2019-05-07 |
| 10242847 | Plasma processing apparatus and liner assembly for tuning electrical skews | James D. Carducci, Shahid Rauf, Kenneth S. Collins | 2019-03-26 |