Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504744 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Eric A. Hudson, Felix Kozakevich +2 more | 2019-12-10 |
| 10381201 | Control of etch rate using modeling, feedback and impedance match | John C. Valcore, Jr., Seyed Jafar Jafarian-Tehrani, Zhigang Chen, Alexei Marakhtanov | 2019-08-13 |
| 10340127 | Using modeling to determine wafer bias associated with a plasma system | John C. Valcore, Jr. | 2019-07-02 |
| 10319570 | Determining a malfunctioning device in a plasma system | John C. Valcore, Jr., Arthur H. Sato | 2019-06-11 |
| 10256078 | Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator | Arthur M. Howald, John C. Valcore, Jr. | 2019-04-09 |
| 10256077 | Sub-pulsing during a state | John C. Valcore, Jr., Harmeet Singh | 2019-04-09 |
| 10231321 | State-based adjustment of power and frequency | John C. Valcore, Jr. | 2019-03-12 |