Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438775 | Methods for automatically determining capacitor values and systems thereof | — | 2019-10-08 |
| 10431426 | Gas plenum arrangement for improving etch non-uniformity in transformer-coupled plasma systems | Tom A. Kamp, Alex Paterson | 2019-10-01 |
| 10347464 | Cycle-averaged frequency tuning for low power voltage mode operation | — | 2019-07-09 |
| 10332725 | Systems and methods for reversing RF current polarity at one output of a multiple output RF matching network | Maolin Long, Alex Paterson | 2019-06-25 |
| 10319570 | Determining a malfunctioning device in a plasma system | John C. Valcore, Jr., Bradford J. Lyndaker | 2019-06-11 |
| 10297422 | Systems and methods for calibrating conversion models and performing position conversions of variable capacitors in match networks of plasma processing systems | — | 2019-05-21 |