Issued Patents 2019
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474780 | Segmenting a model within a plasma system | Arthur M. Howald | 2019-11-12 |
| 10469108 | Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator | Arthur M. Howald, Andrew Fong, David Hopkins | 2019-11-05 |
| 10432248 | RF metrology system for a substrate processing apparatus incorporating RF sensors with corresponding lock-in amplifiers | Ernest Beauel Hanks | 2019-10-01 |
| 10403482 | Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator | Arthur M. Howald, Andrew Fong, David Hopkins | 2019-09-03 |
| 10381201 | Control of etch rate using modeling, feedback and impedance match | Bradford J. Lyndaker, Seyed Jafar Jafarian-Tehrani, Zhigang Chen, Alexei Marakhtanov | 2019-08-13 |
| 10366869 | Active feedback control of subsystems of a process module | Scott Riggs, Ryan Bise, Eric A. Hudson, Ranadeep Bhowmick | 2019-07-30 |
| 10340127 | Using modeling to determine wafer bias associated with a plasma system | Bradford J. Lyndaker | 2019-07-02 |
| 10325760 | System, method and apparatus for using optical data to monitor RF generator operations | Tony San, Seonkyung Lee | 2019-06-18 |
| 10325759 | Multiple control modes | Eric A. Hudson, Ryan Bise | 2019-06-18 |
| 10319570 | Determining a malfunctioning device in a plasma system | Bradford J. Lyndaker, Arthur H. Sato | 2019-06-11 |
| 10296676 | Systems and methods for tuning an impedance matching network in a step-wise fashion | Arthur M. Howald, Andrew Fong, David Hopkins | 2019-05-21 |
| 10276350 | Systems and methods for using computer-generated models to reduce reflected power towards an RF generator during state transitions of the RF generator by controlling RF values of the RF generator | Arthur M. Howald, Andrew Fong, David Hopkins | 2019-04-30 |
| 10256078 | Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator | Arthur M. Howald, Bradford J. Lyndaker | 2019-04-09 |
| 10256077 | Sub-pulsing during a state | Harmeet Singh, Bradford J. Lyndaker | 2019-04-09 |
| 10231321 | State-based adjustment of power and frequency | Bradford J. Lyndaker | 2019-03-12 |
| 10191466 | Systems and methods for synchronizing execution of recipe sets | Tony San, Bostjan Pust | 2019-01-29 |