Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504744 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Eric A. Hudson, Felix Kozakevich, John Holland +2 more | 2019-12-10 |
| 10366869 | Active feedback control of subsystems of a process module | Scott Riggs, Ryan Bise, John C. Valcore, Jr., Eric A. Hudson | 2019-07-30 |