Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431426 | Gas plenum arrangement for improving etch non-uniformity in transformer-coupled plasma systems | Arthur H. Sato, Alex Paterson | 2019-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431426 | Gas plenum arrangement for improving etch non-uniformity in transformer-coupled plasma systems | Arthur H. Sato, Alex Paterson | 2019-10-01 |