Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515781 | Direct drive RF circuit for substrate processing systems | Alexander Paterson | 2019-12-24 |
| 10431434 | Powered grid for plasma chamber | Alex Paterson, Richard A. Marsh, Ying Wu | 2019-10-01 |
| 10340121 | Plasma processing systems including side coils and methods related to the plasma processing systems | Alex Paterson | 2019-07-02 |
| 10332725 | Systems and methods for reversing RF current polarity at one output of a multiple output RF matching network | Arthur H. Sato, Alex Paterson | 2019-06-25 |
| 10264663 | Matchless plasma source for semiconductor wafer fabrication | Yuhou Wang, Ricky Marsh, Alex Paterson | 2019-04-16 |