Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515781 | Direct drive RF circuit for substrate processing systems | Maolin Long | 2019-12-24 |
| 10410836 | Systems and methods for tuning to reduce reflected power in multiple states | Jon McChesney | 2019-09-10 |
| 10262867 | Fast-gas switching for etching | Saravanapriyan Sriraman | 2019-04-16 |
| 10249511 | Ceramic showerhead including central gas injector for tunable convective-diffusive gas flow in semiconductor substrate processing apparatus | Saravanapriyan Sriraman | 2019-04-02 |