Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431434 | Powered grid for plasma chamber | Maolin Long, Alex Paterson, Richard A. Marsh | 2019-10-01 |
| 10395894 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Juline Shoeb, Alex Paterson | 2019-08-27 |
| 10340915 | Frequency and match tuning in one state and frequency tuning in the other state | — | 2019-07-02 |
| 10304660 | Multi-level pulsing of DC and RF signals | Juline Shoeb, Alex Paterson | 2019-05-28 |
| 10242845 | Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber | Zhongkui Tan, Yiting Zhang, Qian Fu, Qing Xu, Saravanapriyan Sriraman +1 more | 2019-03-26 |
| 10224183 | Multi-level parameter and frequency pulsing with a low angular spread | Juline Shoeb, Alex Paterson | 2019-03-05 |
| 10177003 | Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level | Zhongkui Tan, Qian Fu, Qing Xu, Hua Xiang | 2019-01-08 |